מכשיר ציפוי להשמת שכבות דקות - אנטי קורוזיה, עם מכסה חימום

Spin speed: 0~10000rpm
Acceleration: 100~5000rpm/s
Speed resolution: 1rpm
Single step time: 3000s
Substrate size Diameter: ≤ 8 inches (200mm)
Chamber material: PTFE
Heating temperature: ≤200℃
Temperature control method: AIP intelligent temperature control
Operation method: 7 inches HD LCD touch screen
Dispensing method: Manual dispensing, optional precision
syringe pump
Pumping port: Φ8mm quick screw interface
Exhaust system: Vacuum pump Dry mechanical pump; Pumping rate 50L/min